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Information
| Code | BMM0071 |
| Name | Microfabrication |
| Term | 2023-2024 Academic Year |
| Term | Fall |
| Duration (T+A) | 3-0 (T-A) (17 Week) |
| ECTS | 6 ECTS |
| National Credit | 3 National Credit |
| Teaching Language | Türkçe |
| Level | Yüksek Lisans Dersi |
| Type | Normal |
| Mode of study | Yüz Yüze Öğretim |
| Catalog Information Coordinator | |
| Course Instructor |
1 |
Course Goal / Objective
The aim of this course is to introduce the fabrication processes of semiconductor circuit devices and to perform simulations with computer aided design programs.
Course Content
Introduction to microfabrication, Crystal growth techniques, Epitaxy, Doping, Chemical vapor deposition technique, Molecular beam epitaxy, Atomic layer deposition, Thermal oxidation, Wet and dry oxidation, Photolithography, Diffusion, Drive-in process, Etching, Ion implantation, Thin film deposition, metallization
Course Precondition
The course has no prerequisites.
Resources
Gary S. May, Simon M. Sze, "Fundamentals of semiconductor fabrication", Wiley
Notes
S. Franssila, "Introduction to Microfabrication", Wiley
Course Learning Outcomes
| Order | Course Learning Outcomes |
|---|---|
| LO01 | Recognize semiconductor elements |
| LO02 | Learn diffusion process |
| LO03 | Learn oxidation process |
| LO04 | Learn Chemical vapor deposition process |
| LO05 | Learn photolithography process |
| LO06 | Learn ion implantation methods |
| LO07 | Learn etching process |
| LO08 | Learn metallization processes |
| LO09 | Simulate the fundamental microfabrication processes with a TCAD software |
Relation with Program Learning Outcome
| Order | Type | Program Learning Outcomes | Level |
|---|---|---|---|
| PLO01 | Bilgi - Kuramsal, Olgusal | To be able to solve scientific problems encountered in the field of medicine and medical technologies by applying current and advanced technical approaches of mathematics, science and engineering sciences. | 4 |
| PLO02 | Yetkinlikler - Öğrenme Yetkinliği | To have a knowledge of the literature related to a sub-discipline of biomedical engineering, to define and model current problems. | 2 |
| PLO03 | Beceriler - Bilişsel, Uygulamalı | Ability to analyze data, design and conduct experiments, and interpret results | 5 |
| PLO04 | Beceriler - Bilişsel, Uygulamalı | Developing researched contemporary techniques and computational tools for engineering applications | 5 |
| PLO05 | Beceriler - Bilişsel, Uygulamalı | To be able to analyze and design a process in line with a defined target | 3 |
| PLO06 | Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği | Conducting scientific studies with a medical doctor from an engineering perspective. | |
| PLO07 | Yetkinlikler - İletişim ve Sosyal Yetkinlik | Expressing own findings orally and in writing, clearly and concisely. | |
| PLO08 | Yetkinlikler - Öğrenme Yetkinliği | To be able to improve oneself by embracing the importance of lifelong learning and by following the developments in science-technology and contemporary issues. | 4 |
| PLO09 | Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği | Ability to act independently, set priorities and creativity. | 2 |
| PLO10 | Yetkinlikler - Alana Özgü Yetkinlik | Being aware of national and international contemporary scientific and social problems in the field of Biomedical Engineering. | |
| PLO11 | Yetkinlikler - Alana Özgü Yetkinlik | To be able to evaluate the contribution of engineering solutions to problems in medicine, medical technologies and health in a global and social context. |
Week Plan
| Week | Topic | Preparation | Methods |
|---|---|---|---|
| 1 | Introduction to semiconductor microfabrication | Reading lecture materials | |
| 2 | Crystal Growth | Reading lecture materials | |
| 3 | Diffusion process | Reading lecture materials | |
| 4 | Thermal oxidation process | Reading lecture materials | |
| 5 | Epitaxy methods | Reading lecture materials | |
| 6 | Chemical vapor deposition process | Reading lecture materials | |
| 7 | Physical vapor deposition, Atomic Layer Deposition | Reading lecture materials | |
| 8 | Mid-Term Exam | Reading lecture materials | |
| 9 | Mask design | Reading lecture materials | |
| 10 | Photolithography process | Reading lecture materials | |
| 11 | Ion implantation | Reading lecture materials | |
| 12 | Etching | Reading lecture materials | |
| 13 | Rapid thermal annealing | Reading lecture materials | |
| 14 | Metallization | Reading lecture materials | |
| 15 | TCAD simulations | Reading lecture materials | |
| 16 | Term Exams | Reading lecture materials | |
| 17 | Term Exams | Reading lecture materials |
Student Workload - ECTS
| Works | Number | Time (Hour) | Workload (Hour) |
|---|---|---|---|
| Course Related Works | |||
| Class Time (Exam weeks are excluded) | 14 | 3 | 42 |
| Out of Class Study (Preliminary Work, Practice) | 14 | 5 | 70 |
| Assesment Related Works | |||
| Homeworks, Projects, Others | 0 | 0 | 0 |
| Mid-term Exams (Written, Oral, etc.) | 1 | 15 | 15 |
| Final Exam | 1 | 30 | 30 |
| Total Workload (Hour) | 157 | ||
| Total Workload / 25 (h) | 6,28 | ||
| ECTS | 6 ECTS | ||